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ÄÚÆ¼µå ¼¾¼ÀÇ Á¾·ù
DT-NCHR |
DIAMOND COATED Sensor, silicon
cantilever for non-contact- / tapping-mode™, detector side:
Al-coating (optional available without coating), tip side:
Diamond-coating |
CDT-NCHR |
CONDUCTIVE DIAMOND COATED Sensor,
silicon cantilever for non-contact- / tapping-mode™, detector
side: Al-coating, tip side: conductive Diamond-coating |
SSR-NCHR |
SCANNING SPREADING RESISTANCE Sensor,
silicon cantilever for Scanning Spreading Resistance Microscopy,
detector side: Al-coating, tip side: conductive Diamond-coating |
DT-NCLR |
Diamond Coated Sensor,silicon
cantilever for non-contact- / tapping-mode™, long
cantilever,detector side: Al-coating (optional available without
coating),tip side: Diamond-coating |
CDT-NCLR |
Conductive Diamond Coated
Sensor,silicon cantilever for non-contact- / tapping-mode™,
long cantilever,detector side: Al-coating,tip side: conductive
Diamond-coating |
DT-FMR |
Diamond Coated Sensor,silicon
cantilever for force modulation mode, detector side: Al-coating
(optional available without coating), tip side: Diamond-coating |
CDT-FMR |
Conductive Diamond Coated
Sensor,silicon cantilever for force modulation mode, detector side:
Al-coating, tip side: conductive Diamond-coating |
À§ÀÇ Á¦Ç° LIST °°ÀÌ ´ÙÀ̾Ƹóµå ÄÚÆÃ
ÇÁ·Îºê´Â ´Ù¾çÇÑ
ÀÀ¿ëÀ» À§ÇÏ¿© ´Ù¸¥ ±â°èÀûÀΠƯ¼ºÀ» °¡Áø ¿©·¯°¡Áö ¼¾¼°¡
À¯¿ëÇÕ´Ï´Ù. ¾Æ·¡ÀÇ ¿ä¾àÀ» Âü°í ÇϽʽÿä. °¢ ¼¾¼¿¡ ´ëÇÑ
»ó¼¼ ½ºÆåÀº °¢°¢ÀÇ ¼¾¼ ¼³¸íÀ» ÂüÁ¶ÇÏ½Ã¸é µË´Ï´Ù.
¼¾¼ÀÇ
Á¾·ù¿¡ ´ëÇÑ ¿ä¾à
Force Modulation ¼¾¼
DT-FMR
/ CDT-FMR
¼¾¼ÀÇ ¾ÆÁÖ ¼ÒÇÁÆ®ÇÑ ÄµÆ¼·¹¹ö´Â Ç¥¸é°ú È®½ÇÇÏ°Ô Á¢ÃËÀ»
Ç쵂 ¼Õ»óÀº µÇÁö ¾Ê¾Æ¾ß ÇÏ´Â ÀÀ¿ëºÐ¾ß¿ëÀ¸·Î
Á¦À۵Ǿú½À´Ï´Ù.ÀÌ ¼¾¼ÀÇ force
constant ´Â ÄÜÅØ¸ðµå ¿Í ³ÄÜÅØ¸ðµå »çÀÌÀÇ °ªÀ» °®½À´Ï´Ù.
À̰ÍÀº Áß°£Á¤µµÀÇ ÈûÀ¸·Î ÄÜÅØ¸ðµåÇÒ ¼ö ÀÖÀ¸¸ç ¶ÇÇÑ
³ÄÜÅØÀ̳ª ÅÇÇθðµå¿¡¼ »ç¿ëÇÒ ¼ö ÀÖ½À´Ï´Ù. ¶ÇÇÑ, ³ôÀº
¸¶¸ð ÀúÇ×À» °®°í ÀÖ¾î¼ ¼ÒÇÁÆ®ÇÏÁö ¾ÊÀº »ùÇÿ¡¼ÀÇ
¸¶ÂûÀ̳ª ź¼ºÀ» ÃøÁ¤ÇÒ ¼ö ÀÖ°Ô ÇÕ´Ï´Ù.
Non Contact / Tapping™-Mode Sensors - Preferred Type -
±ØÈ÷ ³ôÀº ÆÁ°ú »ùÇð£ÀÇ ÈûÀÌ ¿ä±¸µÇ´Â ÀÀ¿ëºÐ¾ß¿¡ NCH
±â¹ÝÀÇ DT-NCHR
/ CDT-NCHR
ÀÌ À¯¿ëÇÕ´Ï´Ù. ¾à 50 N/m ÀÇ force constants À» °®°í ÀÖ¾î¼
silicon À̳ªsilicon oxide °°Àº ´Ü´ÜÇÑ ¹°ÁúÀ» ¶ÕÀ» ¼ö
ÀÖ½À´Ï´Ù. Áï , scanning spreading resistance microscopy ¿ëÀ¸·Î
ÁýÀûȸ·Î(IC) »óÀÇ ½Ç¸®ÄÜÀÇ ÀÚ¿¬ »êÈÃþ(native oxide
layer)¸¦ ¶Õ½À´Ï´Ù. À̿뵵ÀÇ ¼¾¼·Î´Â SSR-NCHR
ÀÌ À¯¿ëÇÕ´Ï´Ù.
Non Contact / Tapping™-Mode
Sensors - Long Cantilever -
µ¿ÀÏÇÑ ÀÀ¿ëºÐ¾ß¿¡ DT-NCLR
/ CDT-NCLR
µµ »ç¿ëÇÒ ¼ö ÀÖ½À´Ï´Ù. ÀÌ Å¸ÀÔÀº ¿øÀÚÇö¹Ì°æÀÌ high
frequencies (>260 kHz)¸¦ ¼ö¿ëÇÏÁö ¸øÇÏ´Â °æ¿ì³ª
°ËÃâÀåÄ¡(detection system)°¡ 125 µm º¸´Ù ´õ ±ä
ĵƼ·¹¹ö¸¦ ÇÊ¿ä·Î ÇÒ ¶§ »ç¿ëÇÕ´Ï´Ù.
¡¡
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´ÙÀ̾Ƹóµå
ÄÚÆ¼µå ¼¾¼´Â...
´ÙÀ̾Ƹðµå
Ç¥¸é ó¸®µÈ ¼¾¼(DT,CDT)´Â
ÇÁ·Îºê¿Í ½Ã·á »çÀÌ¿¡ °ÇÑ Á¢ÃËÀ» ¿ä±¸ÇÏ´Â ¿øÀÚÇö¹Ì°æ(SPM,AFM)ÀÇ ÀÀ¿ëºÐ¾ß¿¡¼´Â ´ÙÀ̾Ƹóµå
ÄÚÆÃµÈ ¼¾¼ DT,CDT°¡ À¯¿ëÇÕ´Ï´Ù. ¸¶ÂûÃøÁ¤, ¸¶¸ðÃøÁ¤,
³ª³ë½ºÆ®·°Ã³¸µ, ¼ÒÇÁÆ®ÇÏÁö ¾ÊÀº ½Ã·áÀÇ Åº¼º ÃøÁ¤µîÀÇ ÀÀ¿ëºÐ¾ß¿¡ ÀûÇÕÇÏ´Ù.
¶Ç, ÇÑÆíÀ¸·Î´Â ÇÁ·Îºê¿Í »ùÇÃÀÌ °ÇÑ
Á¢ÃËÀ» ÇÊ¿ä·Î ÇÏ¸é¼ ÇÑÆíÀ¸·Î´Â µµÀü¼º ÆÁÀ»
ÇÊ¿ä·ÎÇÏ´Â ÀÀ¿ëºÐ¾ß¿¡ Conductive Diamond Coated Tip sensors (CDT)°¡
À¯¿ëÇÕ´Ï´Ù.
¶ÇÇÑ, Scanning Spreading Resistance Microscopy (SSRM),
Tunneling AFM (Conducting AFM) ¹× Scanning Capacitance Microscopy (SCM)
¿¡¼µµ À¯¿ëÇÕ´Ï´Ù.
ÁÂÃø ±×¸²Àº ´ÙÀ̾Ƹóµå ÄÚÆÃµÈ ÆÁÀÇ SEM À̹ÌÁöÀÌ´Ù. Çʸ²ÀÇ
³ª³ë °áÁ¤±¸Á¶°¡ ºÐ¸íÇÏ°Ô º¸ÀδÙ.
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´õ ¸¹Àº ÀÛµ¿ ¸ðµå ¹× ÀÀ¿ëºÐ¾ß¿¡¼ ÀÌ ´ÙÀ̾Ƹóµå ÄÚÆÃ
ÆÁÀÌ ÀÀ¿ëµÇ°í ÀÖ½À´Ï´Ù. DT ¼¾¼´Â Æ÷ÀÎÆ® ÇÁ·Îºê
non-contact/ tapping mode-high frequency sensor ¶Ç´Â Æ÷ÀÎÆ® ÇÁ·Îºê non-contact
/tapping mode-low frequency sensor¸¦ ±âº»À¸·Î ÇÏ¿© ¸¸µé¸ç
¹Ý»çµµ¸¦ Áõ°¡½Ã۱â À§ÇÏ¿© ĵƼ·¹¹öÀÇ ±¤ °ËÃâ¸éÀ»
¹Ý»ç ÄÚÆÃÇÑ´Ù.
¼¾¼¿¡ ÁöÁ¤ÇÑ ½ºÆåÀ¸·Î ´ÙÀ̾Ƹóµå
ÄÚÆÃÀ» ÇÏ´Â °ÍÀÌ °¡´ÉÇÕ´Ï´Ù. For these NANOSENSORS™ ÀÇ
ǰÁú °ü¸® ±â¼úÀº Á¤È®ÇÑ scanning spreading resistance ÃøÁ¤À»
¼öÇàÇÒ ¼ö ÀÖ½À´Ï´Ù. ÀÌ ÃøÁ¤À» À§ÇÑ ¼¾¼·Î¼ SSR-NCHR °¡
À¯¿ëÇÕ´Ï´Ù.
DTÆÁÀÇ Æ¯Â¡
•
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¶Ù¾î³ °æµµ¸¦ °¡Áö´Â ĵÅÍ·¹¹öÀÇ ÆÁ¸éÀ» ½ÇÁ¦ÀûÀÎ
´ÙÀ̾Ƹóµå ´Ù°áÁ¤Ã¼ ÄÚÆÃÀÌ´Ù.
• ´ÙÀ̾Ƹóµå ÃþÀÇ µÎ²²µµ ¾à
100 nm ÀÌ´Ù.
• °Å½ÃÀûÀÎ ÆÁÀÇ ¹Ý°æÀº ¾à
100 nm¿¡¼ 200nm ÀÌ´Ù. ±×·¸Áö¸¸ ÆÁÀº ÈçÈ÷ ÆòÆòÇÑ Ç¥¸é¿¡¼ ÇØ»óµµ¸¦
°³¼±ÇÏ´Â 10 nm ¿µ¿ª¿¡¼ ³ª³ë °ÅÄ¥±â¸¦ ³ªÅ¸³½´Ù.
• ĵƼ·¹¹ö
µÚ¸é¿¡¼ÀÇ ·¹ÀÌÀú ºöÀÇ ¹Ý»çµµ¸¦
Áõ°¡½Ã۱â À§ÇÏ¿© ¹Ý»ç ÄÚÆÃÀ» ÇÕ´Ï´Ù.
• CDT ¸ðµ¨¿¡¼ ´ÙÀ̾Ƹóµå
ÄÚÆÃÀº ¶Ù¾î³ µµÀü¼º(< 10 kOhm)À» À§ÇÏ¿© °ÇϰÔ
µµÇÎÀÌ µË´Ï´Ù. °Å½ÃÀûÀÎ ÀúÇ×(resistivity)Àº 0.003 - 0.005
Wcm ÀÔ´Ï´Ù.
DT ÆÁÀÇ ÀÀ¿ë»ç·Ê
<NanoStructuring>
¾Æ·¡ À̹ÌÁö¿¡¼ "NANO" ¶ó´Â ±ÛÀÚ´Â Æ÷ÀÎÆ®ÇÁ·Îºê
DT-NCHR ¼¾¼¸¦ °¡Áö°í Si<100>Ç¥¸é¿¡ Àε§Å×À̼ÇÀ» ÇÏ¿© ¸¸µé¾ú´Ù. ±ÛÀÚÅ©±â´Â
250 nm x 250 nm ÀÌ´Ù µµÆ®ÀÇ Å©±â´Â ¾à 60 nm ÀÌ´Ù.
À̹ÌÁö´Â Àε§Å×À̼ÇÈÄ¿¡ Æ÷ÀÎÆ® ÇÁ·Îºê NCH ¼¾¼·Î
ȹµæÇÑ °ÍÀÌ´Ù. À̹ÌÁö »çÀÌÁî : 1.32x1.32µm2
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NANOSENSORS™ /
POINTPROBE¢ç ´Â NanoWorld AG ÀÇ
µî·Ï»óÇ¥ÀÔ´Ï´Ù.
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