DIAMOND COATED Sensors


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DT-NCHR DIAMOND COATED Sensor, silicon cantilever for non-contact- / tapping-mode™, detector side: Al-coating (optional available without coating), tip side: Diamond-coating
CDT-NCHR CONDUCTIVE DIAMOND COATED Sensor, silicon cantilever for non-contact- / tapping-mode™, detector side: Al-coating, tip side: conductive Diamond-coating
SSR-NCHR SCANNING SPREADING RESISTANCE Sensor, silicon cantilever for Scanning Spreading Resistance Microscopy, detector side: Al-coating, tip side: conductive Diamond-coating
DT-NCLR Diamond Coated Sensor,silicon cantilever for non-contact- / tapping-mode™, long cantilever,detector side: Al-coating (optional available without coating),tip side: Diamond-coating
CDT-NCLR Conductive Diamond Coated Sensor,silicon cantilever for non-contact- / tapping-mode™, long cantilever,detector side: Al-coating,tip side: conductive Diamond-coating
DT-FMR Diamond Coated Sensor,silicon cantilever for force modulation mode, detector side: Al-coating (optional available without coating), tip side: Diamond-coating
CDT-FMR Conductive Diamond Coated Sensor,silicon cantilever for force modulation mode, detector side: Al-coating, tip side: conductive Diamond-coating

À§ÀÇ Á¦Ç° LIST °°ÀÌ ´ÙÀ̾Ƹóµå ÄÚÆÃ ÇÁ·Îºê´Â ´Ù¾çÇÑ ÀÀ¿ëÀ» À§ÇÏ¿© ´Ù¸¥ ±â°èÀûÀΠƯ¼ºÀ» °¡Áø ¿©·¯°¡Áö ¼¾¼­°¡ À¯¿ëÇÕ´Ï´Ù. ¾Æ·¡ÀÇ ¿ä¾àÀ» Âü°í ÇϽʽÿä. °¢ ¼¾¼­¿¡ ´ëÇÑ »ó¼¼ ½ºÆåÀº °¢°¢ÀÇ ¼¾¼­ ¼³¸íÀ» ÂüÁ¶ÇÏ½Ã¸é µË´Ï´Ù.

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Force Modulation ¼¾¼­
DT-FMR / CDT-FMR ¼¾¼­ÀÇ ¾ÆÁÖ ¼ÒÇÁÆ®ÇÑ ÄµÆ¼·¹¹ö´Â Ç¥¸é°ú È®½ÇÇÏ°Ô Á¢ÃËÀ» Ç쵂 ¼Õ»óÀº µÇÁö ¾Ê¾Æ¾ß ÇÏ´Â ÀÀ¿ëºÐ¾ß¿ëÀ¸·Î Á¦À۵Ǿú½À´Ï´Ù.ÀÌ ¼¾¼­ÀÇ force constant ´Â ÄÜÅØ¸ðµå ¿Í ³­ÄÜÅØ¸ðµå »çÀÌÀÇ °ªÀ» °®½À´Ï´Ù. À̰ÍÀº Áß°£Á¤µµÀÇ ÈûÀ¸·Î ÄÜÅØ¸ðµåÇÒ ¼ö ÀÖÀ¸¸ç ¶ÇÇÑ ³­ÄÜÅØÀ̳ª ÅÇÇθðµå¿¡¼­ »ç¿ëÇÒ ¼ö ÀÖ½À´Ï´Ù. ¶ÇÇÑ, ³ôÀº ¸¶¸ð ÀúÇ×À» °®°í À־ ¼ÒÇÁÆ®ÇÏÁö ¾ÊÀº »ùÇÿ¡¼­ÀÇ ¸¶ÂûÀ̳ª ź¼ºÀ» ÃøÁ¤ÇÒ ¼ö ÀÖ°Ô ÇÕ´Ï´Ù.


Non Contact / Tapping™-Mode Sensors - Preferred Type -
±ØÈ÷ ³ôÀº ÆÁ°ú »ùÇð£ÀÇ ÈûÀÌ ¿ä±¸µÇ´Â ÀÀ¿ëºÐ¾ß¿¡ NCH ±â¹ÝÀÇ  DT-NCHR / CDT-NCHR ÀÌ À¯¿ëÇÕ´Ï´Ù. ¾à 50 N/m ÀÇ force constants À» °®°í À־ silicon À̳ªsilicon oxide °°Àº ´Ü´ÜÇÑ ¹°ÁúÀ» ¶ÕÀ» ¼ö ÀÖ½À´Ï´Ù. Áï , scanning spreading resistance microscopy ¿ëÀ¸·Î ÁýÀûȸ·Î(IC) »óÀÇ ½Ç¸®ÄÜÀÇ ÀÚ¿¬ »êÈ­Ãþ(native oxide layer)¸¦ ¶Õ½À´Ï´Ù. À̿뵵ÀÇ ¼¾¼­·Î´Â SSR-NCHR ÀÌ À¯¿ëÇÕ´Ï´Ù.

Non Contact / Tapping™-Mode Sensors - Long Cantilever -
µ¿ÀÏÇÑ ÀÀ¿ëºÐ¾ß¿¡ DT-NCLR / CDT-NCLR µµ »ç¿ëÇÒ ¼ö ÀÖ½À´Ï´Ù. ÀÌ Å¸ÀÔÀº ¿øÀÚÇö¹Ì°æÀÌ high frequencies (>260 kHz)¸¦ ¼ö¿ëÇÏÁö ¸øÇÏ´Â °æ¿ì³ª °ËÃâÀåÄ¡(detection system)°¡  125 µm º¸´Ù ´õ ±ä ĵƼ·¹¹ö¸¦ ÇÊ¿ä·Î ÇÒ ¶§ »ç¿ëÇÕ´Ï´Ù.

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´ÙÀ̾Ƹðµå Ç¥¸é ó¸®µÈ ¼¾¼­(DT,CDT)´Â ÇÁ·Îºê¿Í ½Ã·á »çÀÌ¿¡ °­ÇÑ Á¢ÃËÀ» ¿ä±¸ÇÏ´Â ¿øÀÚÇö¹Ì°æ(SPM,AFM)ÀÇ ÀÀ¿ëºÐ¾ß¿¡¼­´Â ´ÙÀ̾Ƹóµå ÄÚÆÃµÈ ¼¾¼­ DT,CDT°¡ À¯¿ëÇÕ´Ï´Ù.  ¸¶ÂûÃøÁ¤, ¸¶¸ðÃøÁ¤, ³ª³ë½ºÆ®·°Ã³¸µ,  ¼ÒÇÁÆ®ÇÏÁö ¾ÊÀº ½Ã·áÀÇ Åº¼º ÃøÁ¤µîÀÇ ÀÀ¿ëºÐ¾ß¿¡ ÀûÇÕÇÏ´Ù.

¶Ç, ÇÑÆíÀ¸·Î´Â ÇÁ·Îºê¿Í »ùÇÃÀÌ °­ÇÑ Á¢ÃËÀ» ÇÊ¿ä·Î Çϸ鼭 ÇÑÆíÀ¸·Î´Â  µµÀü¼º ÆÁÀ» ÇÊ¿ä·ÎÇÏ´Â ÀÀ¿ëºÐ¾ß¿¡ Conductive Diamond Coated Tip sensors (CDT)°¡ À¯¿ëÇÕ´Ï´Ù. 

¶ÇÇÑ, Scanning Spreading Resistance Microscopy (SSRM), Tunneling AFM (Conducting AFM) ¹× Scanning Capacitance Microscopy (SCM) ¿¡¼­µµ À¯¿ëÇÕ´Ï´Ù. 

ÁÂÃø ±×¸²Àº ´ÙÀ̾Ƹóµå ÄÚÆÃµÈ ÆÁÀÇ SEM À̹ÌÁöÀÌ´Ù. Çʸ²ÀÇ ³ª³ë °áÁ¤±¸Á¶°¡ ºÐ¸íÇÏ°Ô º¸ÀδÙ.

ÈξÀ ´õ ¸¹Àº ÀÛµ¿ ¸ðµå ¹× ÀÀ¿ëºÐ¾ß¿¡¼­ ÀÌ ´ÙÀ̾Ƹóµå ÄÚÆÃ ÆÁÀÌ ÀÀ¿ëµÇ°í ÀÖ½À´Ï´Ù.  DT ¼¾¼­´Â Æ÷ÀÎÆ® ÇÁ·Îºê non-contact/ tapping mode-high frequency sensor ¶Ç´Â Æ÷ÀÎÆ® ÇÁ·Îºê non-contact /tapping mode-low frequency sensor¸¦ ±âº»À¸·Î ÇÏ¿© ¸¸µé¸ç ¹Ý»çµµ¸¦ Áõ°¡½Ã۱â À§ÇÏ¿© ĵƼ·¹¹öÀÇ ±¤ °ËÃâ¸éÀ» ¹Ý»ç ÄÚÆÃÇÑ´Ù.

¼¾¼­¿¡ ÁöÁ¤ÇÑ ½ºÆåÀ¸·Î ´ÙÀ̾Ƹóµå ÄÚÆÃÀ» ÇÏ´Â °ÍÀÌ °¡´ÉÇÕ´Ï´Ù. For these NANOSENSORS™ ÀÇ Ç°Áú °ü¸® ±â¼úÀº Á¤È®ÇÑ scanning spreading resistance ÃøÁ¤À» ¼öÇàÇÒ ¼ö ÀÖ½À´Ï´Ù. ÀÌ ÃøÁ¤À» À§ÇÑ ¼¾¼­·Î¼­ SSR-NCHR °¡ À¯¿ëÇÕ´Ï´Ù.

DTÆÁÀÇ Æ¯Â¡

´ÙÀ̾ƸóµåÀÇ ¶Ù¾î³­ °æµµ¸¦ °¡Áö´Â ĵÅÍ·¹¹öÀÇ ÆÁ¸éÀ» ½ÇÁ¦ÀûÀÎ ´ÙÀ̾Ƹóµå ´Ù°áÁ¤Ã¼ ÄÚÆÃÀÌ´Ù. 
´ÙÀ̾Ƹóµå ÃþÀÇ µÎ²²µµ ¾à 100 nm ÀÌ´Ù.
°Å½ÃÀûÀÎ ÆÁÀÇ ¹Ý°æÀº ¾à 100 nm¿¡¼­ 200nm ÀÌ´Ù. ±×·¸Áö¸¸ ÆÁÀº ÈçÈ÷ ÆòÆòÇÑ Ç¥¸é¿¡¼­ ÇØ»óµµ¸¦ °³¼±ÇÏ´Â 10 nm ¿µ¿ª¿¡¼­ ³ª³ë °ÅÄ¥±â¸¦ ³ªÅ¸³½´Ù.
ĵƼ·¹¹ö µÚ¸é¿¡¼­ÀÇ ·¹ÀÌÀú ºöÀÇ ¹Ý»çµµ¸¦ Áõ°¡½Ã۱â À§ÇÏ¿© ¹Ý»ç ÄÚÆÃÀ» ÇÕ´Ï´Ù.
CDT ¸ðµ¨¿¡¼­ ´ÙÀ̾Ƹóµå ÄÚÆÃÀº ¶Ù¾î³­ µµÀü¼º(< 10 kOhm)À» À§ÇÏ¿© °­ÇÏ°Ô µµÇÎÀÌ µË´Ï´Ù. °Å½ÃÀûÀÎ ÀúÇ×(resistivity)Àº 0.003 - 0.005 Wcm ÀÔ´Ï´Ù.

DT ÆÁÀÇ ÀÀ¿ë»ç·Ê 

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¾Æ·¡ À̹ÌÁö¿¡¼­ "NANO" ¶ó´Â ±ÛÀÚ´Â Æ÷ÀÎÆ®ÇÁ·Îºê DT-NCHR ¼¾¼­¸¦ °¡Áö°í Si<100>Ç¥¸é¿¡ Àε§Å×À̼ÇÀ» ÇÏ¿© ¸¸µé¾ú´Ù. ±ÛÀÚÅ©±â´Â 250 nm x 250 nm ÀÌ´Ù µµÆ®ÀÇ Å©±â´Â ¾à 60 nm ÀÌ´Ù. À̹ÌÁö´Â Àε§Å×À̼ÇÈÄ¿¡ Æ÷ÀÎÆ® ÇÁ·Îºê NCH ¼¾¼­·Î ȹµæÇÑ °ÍÀÌ´Ù. À̹ÌÁö »çÀÌÁî : 1.32x1.32µm2

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NANOSENSORS™ / POINTPROBE¢ç ´Â NanoWorld AG ÀÇ µî·Ï»óÇ¥ÀÔ´Ï´Ù.

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