High
Aspect Ratio ¼¾¼ÀÇ Á¾·ù
AR5-NCHR
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Silicon-SPM-Sensor for non-contact- /
tapping-mode™, HIGH ASPECT RATIO tip, aspect ratio >=
5:1,detector side: Al-coating (optional available without coating) |
AR5T-NCHR
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TILT COMPENSATED HIGH ASPECT RATIO
Sensor, silicon cantilever for non-contact- / tapping-mode™,
HIGH ASPECT RATIO tip, aspect ratio >= 5:1, tilt compensation 13¡Æ,
detector side: Al-coating (optional available without coating) |
AR10-NCHR
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HIGH ASPECT RATIO Sensor, silicon
cantilever for non-contact- / tapping-mode™, HIGH ASPECT RATIO
tip, aspect ratio >= 10:1, detector side: Al-coating (optional
available without coating) |
AR5-NCLR
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High Aspect Ratio Sensor,silicon
cantilever for non-contact- / tapping-mode™, long
cantilever,HIGH ASPECT RATIO tip, aspect ratio ? 5:1,detector side:
Al-coating (optional available without coating) |
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NANOSENSORS™
ÀÇ High Aspect Ratio ¼¾¼ÀÇ
°øÁ¤¿¡¼ ¿øÀÚÇö¹Ì°æÀÇ ÇìµåÀÇ ¸¶¿îÆ®¿¡¼
¿ä±¸µÇ¾îÁö´Â °¢µµÀÇ º¸Á¤ÇÑ »õ·Î¿î ¸ðµ¨À»
Á¦°øÇÕ´Ï´Ù. Áï, ÆÁÀÇ ³¡ 2 µm ºÎºÐÀÌ ÆÁÀÇ Áß½ÉÃà¿¡
µ¥ÇÏ¿© 13¡Æ ±â¿ï¾îÁý´Ï´Ù. ÀÌ Æ¯Â¡Àº ´õ¿í ´ëμºÀÖ´Â
½ºÄµÀ» ÇÒ ¼ö ÀÖµµ·Ï Çϱ⠶§¹®¿¡ °ÅÀÇ ¼öÁ÷¿¡ °¡±î¿î
sidewall À» ÃøÁ¤ÇÒ ¼ö ÀÖ½À´Ï´Ù.
¸ðµç high aspect ratio
ÆÁ(¼¾¼)µéÀº Àß ¼³Á¤µÈ SFM ¼¾¼ Á¦Á¶ °øÁ¤¿¡ µû¶ó
Á¦Á¶µË´Ï´Ù. Ȧ´õ ¹× ĵƼ·¹¹ö´Â NANOSENSORS™
SFM sensors µé°ú µ¿ÀÏÇÕ´Ï´Ù.
HighAspectRatio
¼¾¼ÀÇ Æ¯Â¡
• HAR ºÎºÐÀÇ ±æÀÌ´Â Åë»óÀûÀ¸·Î °¢°¢ 1.5 µm ¶Ç´Â
2 µm ÀÌ»óÀÔ´Ï´Ù.
• AR5 ¸ðµ¨ÀÇ °æ¿ì ¸¶Áö¸· ºÎºÐ 2 µm ¿¡¼ÀÇ
Åë»óÀûÀÎ ARÀº ¾à 7:1 ÀÌ´Ù. ÃÖ¼ÒÇÑ 5:1 ÀÇ ARÀ»
º¸ÀåÇÕ´Ï´Ù.
• AR10 ¸ðµ¨ÀÇ °æ¿ì ¸¶Áö¸· ºÎºÐ 1.5 µm ¿¡¼ÀÇ
Åë»óÀûÀÎ ARÀº ¾à 12:1 ÀÌ´Ù. ÃÖ¼ÒÇÑ 10:1 ÀÇ ARÀ»
º¸ÀåÇÕ´Ï´Ù.
• µû¶ó¼ °¢°¢ÀÇ ¹Ý¿øÃß°¢(half
cone angle)Àº Åë»ó 5¡Æ
¶Ç´Â 2.8¡Æ º¸´Ù ÀÛ½À´Ï´Ù.
• ÆÁÀÇ ¹Ý°æÀº Åë»ó 10 nm º¸´Ù ÁÁ´Ù. ÃÖ¼ÒÇÑ 15 nm¸¦
º¸ÀåÇÑ´Ù.
• ƿƮ º¸»óµÇ´Â Ưº°ÇÑ ÆÁÀº½ºÄµ
ÇìµåÀÇ Æ¿Æ®¸¦ º¸»óÇÏ¿© ÁÝ´Ï´Ù.
• ÆÁÀÇ Àüü ³ôÀÌ´Â 10 µm ¿¡¼ 15 µm ·Î¼
»ó´çÈ÷ °ÅÄ£ Ç¥¸éÀ» ÃøÁ¤ÇÒ ¼ö ÀÖ½À´Ï´Ù.
• ¼¾¼ÀÇ ³¡ ºÎºÐ »Ó¾Æ´Ï¶ó Àüü°¡ Çѵ¢¾î¸®ÀÇ
½Ç¸®ÄÜ ´Ü°áÁ¤À¸·Î Á¦Á¶µÇ±â ¶§¹®¿¡ ³ôÀº Lateral stiffness
¿Í rigidity ¸¦ °®°í ÀÖ½À´Ï´Ù.
À¯¿ëÇÑ
HighAspectRatio ¼¾¼
ŸÀÔ
ÀÌ HighAspectRatio™ ÆÁ ¸ð¾çÀº
¾Æ·¡¿Í °°À̰ÅÀÇ ¸ðµç non contact / TappingMode™
¼¾¼¿¡ À¯¿ëÇÕ´Ï´Ù.:
AR5-NCHR
AR5T-NCHR
AR10-NCHR
AR5-NCLR
HighAspectRatio
¼¾¼ÀÇ ÀÀ¿ë»ç·Ê
<¾ð¸®ÄÆ ±¸Á¶ÀÇ À̹ÌÁö>
<ÀÏ¹ÝÆÁ°ú HARÆÁÀ¸·Î
ÃøÁ¤ÇÑ À̹ÌÁö>¿ÞÂÊ ±×¸²ÀÇ À§´Â 1.7 µm
³ôÀ̸¦ °¡Áø ¾ð´õ ÄÆ ±¸Á¶¸¦ °¡Áø ½Ã·á¸¦ Ç¥ÁØ
¼¾¼ÀÎ Æ÷ÀÎÆ® ÇÁ·Îºê NCH ¼¾¼·Î ¾Æ·¡´Â Æ÷ÀÎÆ®
ÇÁ·Îºê AR5-NCH ¼¾¼·Î µ¿ÀÏÇÑ ¿µ¿ªÀ» ½ºÄµÇÑ °ÍÀÌ´Ù.
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ˤ˂
À̹ÌÁö´Â ¾Æ·¡ÀÇ ¾ð´õÄÆÀ» °¡Áø ½Ã·á¸¦ µÎ°¡Áö
Á¾·ùÀÇ ¼¾¼¸¦ »ç¿ëÇÏ¿© ½ÇÇèÇÑ ÀÀ¿ë¿¹
ÀÔ´Ï´Ù. À§ ±×¸²ÀÇ ÀÂÊ À̹ÌÁö´Â Ç¥ÁØ ¼¾¼ÀÎ
NANOSENSORS™ ÀÇ NCH ¼¾¼·Î ȹµæÇÑ
À̹ÌÁöÀÔ´Ï´Ù. ¾Æ·§ÂÊÀº NANOSENSORS™ ÀÇ
AR5-NCH ¼¾¼·Î ÀÂʰú µ¿ÀÏÇÑ ¿µ¿ªÀ» ½ºÄµÇÑ
°ÍÀÔ´Ï´Ù. À§ ±×¸²ÀÇ ¿ìÃø¿¡ ÀÖ´Â ´Ü¸éµµ¿Í
ºÐ¼®Ç¥¿¡ ÀÇÇÏ¸é ¾Æ·§ÂÊÀÇ À̹ÌÁö¿¡¼ sidewall
ÀÌ ´õ °¡ÆÄ¸¥ °ÍÀ» ºÐ¸íÈ÷ ¾Ë ¼ö ÀÖ½À´Ï´Ù.
¿©±â¼ Ç¥ÁØ NCH ¼¾¼¿¡¼ ÆÁÀÇ °¢ÀÌ 65.7¢ª¿¡¼
72.3¢ª À̰í AR5-NCH ¼¾¼¿¡¼´Â 85.5¢ª¿¡¼ 87.6¢ª ÀÎ
°ÍÀ» ¾Ë ¼ö ÀÖ½À´Ï´Ù. |
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