PPP-RT-NCHR |
Point
Probe¢ç Plus
Rotated Tip Non-contact
/ Tapping™mode
with reflected coatings- High resonance
frequency |
ÀÌ »õ·Î¿î
PointProbe¢ç
Plus (PPP)´Â ¶Ù¾î³ ´Ù¾çÇÑ ÀÀ¿ë¼º°ú ȣȯ¼ºÀ¸·Î ÀÌ¹Ì ÀÔÁõµÈ
PointProbe¢ç
½Ã¸®ÁîÀÇ ÆÁ ¼±´ÜÀÇ ¸ð¾çÀ» ´õ¿í ¿Ïº®ÇÑ ±¸Á¶·Î ¼³°èÇÏ¿© ÆÁÀÇ ¹Ý°æÀ» ´õ¿í ÀÛ°Ô ÇÏ¿´°í ÆÁÀÇ ¼±´ÜÀÇ Ç°ÁúÀ» ´õ¿í ¾ÈÁ¤È ½ÃŲ
Á¦Ç°À¸·Î Åë»óÀûÀÎ ÆÁÀÇ ¹Ý°æÀ» ±âÁ¸ PointProbe¢ç
½Ã¸®ÁîÀÇ 10 nm ÀÌÇϸ¦ 7 nm ÀÌÇÏ·Î Å©°Ô °³¼±ÇÏ¿´°í ¶ÇÇÑ ´õ¿í °³¼±µÈ ÆÁÀÇ Ç°Áú ¾ÈÁ¤À¸·Î °³¼±µÈ ÇØ»óµµ¿Í °³¼±µÈ
À̹ÌÁö ÀçÇö¼ºÀ» Á¦°øÇϰí ÀÖ½À´Ï´Ù.
¡¡ ¾î¶² ÀÀ¿ëºÐ¾ßÀÇ °æ¿ì Rotated TipÀ¸·Î ´õ ÁÁÀº ´ëĪ À̹ÌÁö¸¦ ¾òÀ» ¼ö
ÀÖ½À´Ï´Ù. ÆÁÀÇ ¸ð¾çÀº ±âÁ¸
PointProbe¢ç
Plus(PPP)¿Í µ¿ÀÏÇÏÁö¸¸ ÆÁÀÌ ÄµÆ¼·¹¹öÀÇ Beam¹æÇâÀ¸·Î 180µµ ȸÀüµÇ¾î ÀÖ½À´Ï´Ù. Àη¸ðµå(Attractive mode)¶Ç´Â µ¿Àû¸ðµå(Dynamic mode)¶ó°íµµ
ºÒ·ÁÁö´Â ºñÁ¢Ã˸ðµå(Non contact mode) ¶Ç´Â ÅÇÇθðµå(TappingTM
mode) ÁÖ»ç Žħ Çö¹Ì°æ¿¡¼´Â Æ÷ÀÎÆ® ÇÁ·Îºê¼¾¼ PPP-RT-NCHR(non-contact
/ high frequency)°¡ ÀûÇÕÇÕ´Ï´Ù. ÀÌ ¼¾¼´Â ¶Ù¾î³ °¨µµ¿Í
ºü¸¥ ÁÖ»ç´É·ÂÀ» °¡Áö¸ç ³ôÀº µ¿ÀÛ ¾ÈÁ¤¼ºÀ» °¡Áý´Ï´Ù.
´ÙÀ½°ú °°Àº ¼¾¼¿¡ ´ëÇÑ Ãß°¡ÀûÀΠƯ¡ÀÌ ÀÖ½À´Ï´Ù. ¡¡
¡¡ ¹Ý»ç¸éÀ» ·¹ÀÌÀúºöÀÇ ¹Ý»çµµ¸¦ 2.5 Factor ±îÁö Áõ°¡½Ã۱â À§ÇÏ¿© ¾à 30 nm
µÎ²²ÀÇ ¾Ë·ç¹Ì´½À¸·Î ÄÚÆÃÀ» ÇÏ¿´½À´Ï´Ù. ÀÌ·¸°Ô ÇÔÀ¸·Î¼ ºûÀÌ ÄµÆ¼·¹¹ö³»·Î °£¼·µÇ´Â °ÍÀ» ¹æÁöÇÏ¿´½À´Ï´Ù. ÀÌ ÄÚÆÃÀº ĵƼ·¹¹ö¸¦ Á¶±Ý¹Û¿¡
¹êµùÀ» ½ÃŰÁö ¾Ê½À´Ï´Ù. ¼öÁ÷ ¹æÇâÀ¸·Î ÈÚÀ» ¹æÁö¸¦ À§ÇÑ ÄÚÆÃÀÌ µÇ¾î ÀÖ¾î ¹êµùÀº ĵƼ·¹¹ö ±æÀÌÀÇ 2% À̳»ÀÔ´Ï´Ù.
PPP-RT-NCHR ÇÁ·ÎºêÀÇ ¸ð¾ç°ú Ư¡
• Åë»óÀûÀÎ
ÆÁÀÇ ¹Ý°æÀº 10nmÀÌÇÏ(SuperSharpSiliconÀº Åë»ó 2nmÀÌÇÏ)
• ÆÁ, ĵƼ·¹¹ö Ȧ´õ°¡
Çѵ¢¾î¸®·Î µÇ¾î ÀÖ´Ù.
• ¼¾¼ÀÇ ÁÖ¿äÇÑ Àç·á´Â
½Ç¸®ÄÜ ´Ü°áÁ¤ÀÌ´Ù.
• Àü±â(Á¤Àü) ÃæÀüÀ»
¹æÁöÇϱâ À§ÇÏ¿© µµÇÎ ³óµµ°¡ ³ô´Ù.
• ÈÇÐÀûÀ¸·Î
ºÒȰ¼ºÀÌ´Ù.
• °í°¨µµ¸¦ À§ÇØ ³ôÀº
±â°èÀû Q-factor¸¦ °®°Ô ÇÏ¿´´Ù.
|
 |
 |
´õ ¸¹Àº
Á¤º¸°¡ ÇÊ¿äÇϸé
ÀϹݼ³¸í
À» º¸½Ã¸é
µË´Ï´Ù.
¡¡
PPP-RT-NCHR
±â¼ú ÀÚ·á |
¡¡ |
Typical Value
|
Specified Values
|
Thickness /¥ìm |
4
|
3.0 - 5.0
|
Mean Width /¥ìm |
30
|
22.5 - 37.5
|
Length /¥ìm |
125
|
115 - 135
|
Force Constant /(N/m) |
42
|
10 - 130
|
Resonance Frequency /kHz |
330
|
204 - 497
|
PPP-RT-NCHR
ÁÖ¹® ÄÚµå, Æ÷Àå´ÜÀ§, ÄÚÆÃ
PPP-RT-NCHR ´Â
´ÙÀ½ ÇüÅÂÀÇ ¼±Àû ´ÜÀ§°¡
ÀÖ½À´Ï´Ù.
|
ÁÖ¹® ÄÚµå |
Æ÷Àå´ÜÀ§ |
Data Sheet |
ÄÚÆÃ |
PPP-RT-NCHR-10# |
10
|
¸ðµç ¼¾¼ |
¹Ý»ç¸é |
PPP-RT-NCHR-20# |
20
|
¸ðµç ¼¾¼ |
¹Ý»ç¸é |
PPP-RT-NCHR-50 |
50
|
¾øÀ½ |
¹Ý»ç¸é |

NANOSENSORS™
/ POINTPROBE¢ç´Â NanoWorld AG
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