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LFM Sensors for Lateral Friction Force Microscopy

LFM(Lateral Friction Force Microscopy) ¿ë ¼¾¼­ Á¾·ù

PPP-LFMR Silicon-SPM-Sensor,silicon cantilever for lateral / friction force microscopy,detector side: Al-coating

LFM(Lateral Friction Force Microscopy) ¿ë ¼¾¼­´Â...
ÀÌ LFM ¼¾¼­´Â ¿øÀÚÇö¹Ì°æ¿¡¼­ ¸¶Âû·Â ÃøÁ¤(lateral force microscopy) À» ÇÏ´Â ¸ñÀûÀ¸·Î »ç¿ëÇÏ´Â ¼¾¼­´Â  NANOSENSORSÀÇ PPP-LFMR ¼¾¼­°¡ À¯¿ëÇÕ´Ï´Ù. ÀÌ ¼¾¼­´Â ±ØÈ÷ ºÎµå·´°í ¾ã¾Æ¼­ Ãø¹æÀ¸·Î ÀÛ¿ëÇÏ´Â ÈûÀ» °í°¨µµ·Î °¨ÁöÇϵµ·Ï ÃÖÀûÈ­µÇ¾î ÀÖ½À´Ï´Ù. ¶Ç Ưº°ÇÑ ÄÚÆÃ°ü·Ã Á¤º¸´Â  Ç¥¸éó¸®(ÄÚÆÃ) À» Âü°íÇÏ½Ã¸é µË´Ï´Ù. 

¼¾¼­¿¡ ´ëÇÑ ±â¼úÀÚ·á, ÁÖ¹®, Æ÷Àå´ÜÀ§, ÄÚÆÃ¿¡ ´ëÇÑ °üÇÑ Á¤º¸´Â °¢ ¼¾¼­ÀÇ °³º° ÀڷḦ Âü°íÇϽʽÿä. °³º° ÀڷḦ º¸½Ã·Á¸é À­¸éÀÇ  Á¾·ù¿¡¼­ ÇØ´ç ¼¾¼­¸¦ ¼±ÅÃÇϽðųª ¾Æ·¡ÀÇ Quick Selection Table¸¦ ÀÌ¿ëÇÏ½Ã¸é µË´Ï´Ù.

¹Ý»ç¸é ÄÚÆÃ(Reflex Coating)

Reflex ÄÚÆÃÀº ĵƼ·¹¹öÀÇ µÞ¸é¿¡ ¾à 30 nm µÎ²²·Î ¾Ë¸®¹Ì´½ ÄÚÆÃÀ» ÇÑ °ÍÀÌ´Ù. ÀÌ·¸°Ô ÇÏ¿© ·¹ÀÌÀú ºöÀÇ ¹Ý»çµµ¸¦ ¾à 2.5¹è °¡·® °³¼±Çϰí ĵƼ·¹¹ö³»¿¡¼­ÀÇ ºûÀÇ °£¼·ÀÌ µÇÁö ¾Ê°Ô ÇÑ´Ù. ÄÚÆÃ ½ºÆ®·¹½º¿¡ ÀÇÇÑ ¹êµùÀÌ 2¡Æ ÀÌÇÏ·Î °ÅÀÇ ½ºÆ®·¹½º¸¦ ¹ÞÁö ¾Ê½À´Ï´Ù. ¹Ý»ç¸éÀÇ ÄÚÆÃ(Reflex coating)Àº  ÀÀ¿ëºÐ¾ß°¡ È­ÇÐÀûÀ¸·Î ȣȯ¼ºÀÌ ÀÖ´Ù¸é(¹®Á¦°¡ ¾ÈµÈ´Ù¸é) CONT, LFM, FM °ú °°Àº ¾ãÀº ĵƼ·¹¹öÀÇ °æ¿ì¿¡´Â °­·ÂÈ÷ ÃßõµË´Ï´Ù.

PPP-LFMR ¼¾¼­ÀÇ ¸ð¾ç°ú Ư¡

Åë»óÀûÀÎ ÆÁÀÇ ¹Ý°æÀº 10nmÀÌÇÏ
ÆÁ, ĵƼ·¹¹ö Ȧ´õ°¡ Çѵ¢¾î¸®·Î µÇ¾î ÀÖ´Ù.
¼¾¼­ÀÇ ÁÖ¿äÇÑ Àç·á´Â ½Ç¸®ÄÜ ´Ü°áÁ¤ÀÌ´Ù.
Àü±â(Á¤Àü) ÃæÀüÀ» ¹æÁöÇϱâ À§ÇÏ¿© µµÇÎ ³óµµ°¡ ³ô´Ù.
È­ÇÐÀûÀ¸·Î ºÒȰ¼ºÀÌ´Ù.
°í°¨µµ¸¦ À§ÇØ ³ôÀº ±â°èÀû Q-factor¸¦ °®°Ô ÇÏ¿´´Ù.

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Lateral Friction Force Microscopy ¿ø¸® ¹× À̹ÌÁö

Lateral Force (LFM)

Ç¥¸éÀ» ½ºÄµÇϸ鼭 ĵƼ·¹¹öÀÇ Torsion À» ÃøÁ¤ÇÕ´Ï´Ù.

Topography

Gold Ç¥¸éÀÇ Alkane Thiol ¿¡¼­ ÅäÆ÷±×¶óÇÇ Feature µéÀÌ  ¾ø´Â °ÍÀ» ¾Ë ¼ö ÀÖ½À´Ï´Ù.

LFM À̹ÌÁö

LFM À̹ÌÁö¿¡¼­ ÆÐÅÏÀ» º¼ ¼ö ÀÖ½À´Ï´Ù.
Acid – Bright
Methyl - Dark

¿©±â¿¡ ¾ø´Â Ưº°ÇÑ ÁÖ¹®À̳ª ´õ ÀÚ¼¼ÇÑ ³»¿ëÀº SXM ¼¾¼­¸¦ À§ÇÑ ÀϹÝÀûÀÎ ¼³¸í À» ÂüÁ¶¹Ù¶ø´Ï´Ù.

NANOSENSORS™ / POINTPROBE¢ç ´Â NanoWorld AG ÀÇ µî·Ï»óÇ¥ÀÔ´Ï´Ù.