SuperSharpSilicon Sensors
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SuperSharpSilicon ¼¾¼ÀÇ Á¾·ù
SSS-NCH |
SUPER SHARP SILICON™-SPM-Sensor
for non-contact- / tapping-mode™ |
SSS-NCHR |
SUPERSHARPSILICON™-SPM-Sensor,
silicon cantilever for non-contact- / tapping-mode, with
SUPERSHARPSILICON tip detector side: Al-coating |
SSS-NCL |
SuperSharpSilicon-SPM-Sensor, silicon
cantilever for non-contact- / tapping-mode™, long
cantilever,with SuperSharpSilicon tip |
SSS-NCLR |
SUPERSHARPSILICON™-SPM-Sensor,
silicon cantilever for non-contact- / tapping-mode, long cantilever,
with SUPERSHARPSILICON tip
detector side: Al-coating |
SSS-NCLR |
SuperSharpSiliconTM-SPM-Sensor,silicon
cantilever for non-contact / tapping-mode™, special type
A,with SuperSharpSilicon tip |
SSS-NCLR |
SUPERSHARPSILICON™-SPM-Sensor,
silicon cantilever for non-contact- / tapping-mode, for Seiko
Instruments AFM, with SUPERSHARPSILICON tip
detector side: Al-coating |
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SuperSharpSilicon ¼¾¼´Â...NANOSENSORS™
¿¡¼´Â ³ª³ë±¸Á¶ ¹× ¸¶ÀÌÅ©·Î °ÅÄ¥±âÀÇ
°³¼±µÈ ÇØ»óµµ¸¦ À§ÇÏ¿© »õ·Î¿î Áøº¸µÈ ÆÁ »ý»ê°øÁ¤À»
°³¹ßÇÏ¿© ÀÌ °øÁ¤À» ÅëÇÏ¿© ±âÁ¸ÀÇ ÆÁÀÇ ¹Ý°æº¸´Ù ÈξÀ
¶Ù¾î³ ÆÁÀÇ ¹Ý°æ 2 nm <¿ìÃø ±×¸²> ÀÌÇÏÀÎ ±ØÈ÷
»ÏÁ·ÇÑ ÆÁÀ» ¸¸µé°í ÀÖ´Ù. ³ª³ë ¼¾¼ÀÇ ÀÌ·¯ÇÑ
»õ·Î¿î °Í¿¡ ´ëÇÑ ³ë·ÂÀº ÆÁÀÇ ¿¬±¸ °³¹ß ¹× »ý»ê
±â¼ú¿¡¼ ¼¼°è¸¦ ¼±µµÇϰí ÀÖ½À´Ï´Ù. supersharpsilicom
ÆÁµéÀº Àß ¸¸µé¾îÁø Æ÷ÀÎÆ®ÇÁ·Îºê ¼¾¼¸¦ ±âº»À¸·Î
ÇÏ¿© ¸¸µì´Ï´Ù. µû¶ó¼ ¼¾¼ÀÇ ±âÇÏÇÐÀûÀÎ ¸ð¾çÀº
Æ÷ÀÎÆ® ÇÁ·Îºê ¼¾¼µé°ú °°½À´Ï´Ù. (´õ
¸¹Àº Á¤º¸´Â Æ÷ÀÎÆ® ÇÁ·Îºê ¼¾¼ÀÇ ÀϹݻçÇ×À»
ÂüÁ¶ÇϽʽÿÀ.) ĵƼ·¹¹öÀÇ ±â°èÀûÀΠƯ¼ºµéÀº °¢
SuperSharp Silicon ¼¾¼ °¢°¢ÀÇ »ý»ê°ü·Ã »çÇ׿¡¼ ¼³¸íµÇ¾î
ÀÖ½À´Ï´Ù. ÀÌµé ¼Ó¼ºÀ» Áøº¸µÈ SuperSharpSilicon ÆÁÀÇ
¸ð¾ç°ú °ü·Ã»çÇ×ÀÔ´Ï´Ù. SuperSharpSilicon ¼¾¼´Â Æ÷ÀÎÆ® ÇÁ·Îºê ºñÁ¢Ã˽Ä/ÅÇÇθðµå¿ë
(NCH ¶Ç´Â
SEIHR)¸¦
±âº»À¸·Î ÇÏ¿© ¸¸µì´Ï´Ù. À̰͵éÀÇ ±â°èÀûÀΠƯ¼ºÀº ¸Å¿ì
³ôÀº µ¿ÀÛ ¾ÈÁ¤µµ¸¦ °®°í ÀÖ¾î¼ °í¼Ó Áֻ簡 °¡´ÉÇÏ´Ù.
´õ ¸¹Àº
Á¤º¸´Â Æ÷ÀÎÆ® ÇÁ·Îºê ¼¾¼ÀÇ NCH
, SEIHR
,¹× ÀϹÝ
¼³¸íÀ» ÂüÁ¶ÇϽʽÿÀ.
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¡¡
<À¯¿ëÇÑ ¼¾¼ ŸÀÔ>
ÀÌ SuperSharpSilicon™ ÆÁ ¸ð¾çÀº ¾Æ·¡¿Í °°À̰ÅÀÇ
¸ðµç non contact / TappingMode™ ¼¾¼¿¡
À¯¿ëÇÕ´Ï´Ù.:
SSS-NCH
SSS-NCL
SSS-SEIH
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SuperSharpSilicon ¼¾¼ÀÇ Æ¯Â¡
• Åë»ó supersharpsilicom ÆÁÀÇ ¹Ý°æÀ» ¾à 2 nmº¸´Ù ÁÁ´Ù.
• º¸ÁõµÇ´Â ÆÁÀÇ ¹Ý°æÀÌ 5 nm ÀÌÇÏÀÌ´Ù (º¸ÁõµÇ´Â »ý»êÀ²:80%)
• ¹Ý¿øÃß°¢Àº ÆÁ ³¡ºÎºÐ 200 nm¿¡¼ 10¢ª º¸´Ù ÁÁ´Ù.
• ÆÁÀÇ ³ôÀÌ´Â
10 µm¿¡¼ 15 µm »çÀÌ·Î »ó´çÈ÷ °ÅÄ£ ½Ã·á Ç¥¸éÀ» ÃøÁ¤ ÇÒ ¼ö ÀÖ´Ù.
´õ ¸¹Àº
Á¤º¸´Â NANOSENSORS™ÀÇ NCH
¹× ÀϹÝ
¼³¸íÀ» ÂüÁ¶ÇϽʽÿÀ.¡¡ ¡¡
SuperSharpSilicon
¼¾¼ÀÇ ÀÀ¿ë»ç·Ê
<°³¼±µÈ ÇØ»óµµÀÇ image>
¾Æ·¡ À̹ÌÁö´Â "A" ¶ó´Â ±ÛÀÚ¸¦ Æ÷ÀÎÆ® ÇÁ·Îºê DT-NCHR
¼¾¼¸¦ °¡Áö°í
³ª³ë ½ºÆ®·°Ãĸµ¿¡ ÀÇÇØ ¸¸µç °ÍÀÌ´Ù.
À̹ÌÁö´Â DT-NCHR ¼¾¼·Î
Àε§Å×À̼ÇÈÄ¿¡ Ç¥ÁØ Æ÷ÀÎÆ® ÇÁ·Îºê NCH ¼¾¼·Î ȹµæÇÑ
°ÍÀ¸·Î ÆÁÀÇ Áö¸§ÀÌ DT_NCHR ¼¾¼·Î ÀÎÅÙÆÃÇÏ¿© ¾òÀº ±¸¸Ûµé º¸´Ù Ä¿¼
±¸¸ÛµéÀÇ bulged sidewall µé¸¸ °üÂûµÈ´Ù. ¿À¸¥ÂÊ À̹ÌÁö´Â
SuperSharpSilicon ¼¾¼ SSS-NCH
¼¾¼·Î ȹµæÇÑ °ÍÀ¸·Î ÆÁÀÇ ´õ »ÏÁ·ÇÏ°Ô µÇ¾î ÀÖ¾î¼
±¸¸ÛÀÇ ½ÇÁ¦ÀÇ ³ÐÀÌ, ±íÀÌ, ±×¸®°í bulged sidewall µéÀÌ °üÂûµÈ´Ù.
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Ç¥ÁØ NANOSENSORS™ÀÇ NCH ¼¾¼·Î ȹµæÇÑ
À̹ÌÁö(¿ÞÂÊ)¿Í SuperSharpSilicom ¼¾¼ SSS-NCH
¼¾¼·Î ȹµæÇÑ À̹ÌÁöÀÌ´Ù.
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NANOSENSORS™ /
POINTPROBE¢ç ´Â NanoWorld AG ÀÇ
µî·Ï»óÇ¥ÀÔ´Ï´Ù.
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